Rapid Prototyping of Metallic Cantilevers for High-Q-Value Micro-Mechanical Oscillators (MMOS)
Resonant metallic structures are crucial for telecommunications, biosensors, and microrobotics. However, it presents challenges in obtaining high-quality metallic structures using traditional microfabrication methods. Here, we present a rapid prototyping method that combines two-photon polymerization and electrochemical etching to achieve metallic cantilevers of submillimeter sizes for Micro-Mechanical Oscillators (MMOSs). A mask with cantilever designs for selective […]